Semiconductor clean oven
Product description
One,Applicable area
This oven is suitable for use in clean workshops,It is suitable for heat treatment such as drying in high-precision semiconductors, curing of glue, and drying after cleaning of precision optical components.
two,Features
SUS304 1.5mmStainless steel plate, full welding process;
The air duct in the box is equipped with a clean air inlet and a high-efficiency filter. Ventilation and non-ventilation modes can be used to ensure slight positive pressure in the box to ensure that pollutants cannot enter the inner box;
The high efficiency filter HEPA filter net constructs a clean room, which can carry out one-way filtering and circulating filtering of the gas in the box. According to the requirements of use, it can meet the cleanliness level ISO Class 5 (national standard 100), ISO Class 6 (national standard 1000), ISO Class 7 (national standard 10000) and other requirements;
Equipped with automatic nitrogen filling device, and automatic opening and closing air door for nitrogen filling and baking;
Newly developed touch screen operating system, with high-precision PID main controller, temperature control accuracy of ±0.1℃, automatic constant temperature. You can save recipes, view temperature curves, export temperature rise data, etc.;
According to usage requirements, customization can be accepted.
three,Specification list
model |
YH-J100-ES-02 |
Working stability range |
Room temperature—150℃ |
Use voltage |
Three-phase five-wire 380V, 50Hz |
Temperature control accuracy |
±0.1℃ |
heating power |
6KW |
Temperature uniformity |
±3%℃ |
Temperature stability |
±2℃ |
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size |
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Working size |
H910mm*W620mm*D620mm |
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